| 摘要 |
PROBLEM TO BE SOLVED: To provide a super hard film coated member in which a super hard film can be allowed to adhere firmly and stably to a base material, and also to provide its manufacturing method. SOLUTION: In the super hard film coated member, the surface of the base material composed of a hard metal consisting of WC of 5 to 20μm average particle size and Co as a binding phase is coated with the super hard film composed of diamond or diamond-like carbon and a large number of irregularities are provided to the surface of the WC particles existing on the surface of the base material. As to its manufacturing method, the base material composed of the hard metal consisting of WC of 5 to 20μm average particle size and Co as a binding phase is heat-treated in a vacuum atmosphere at a temperatures of 950 to 1,150°C using a furnace whose wall material is composed essentially of aluminum oxide, and then the super hard film composed of diamond or diamond-like carbon is deposited by a CVD method onto the resultant heat-treated surface. COPYRIGHT: (C)2003,JPO
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