| 摘要 |
PROBLEM TO BE SOLVED: To provide a radical gun having a long lifetime in which stabilized machining characteristics can be sustained over a long term. SOLUTION: The radical gun comprises an insulating container 4 having an opening for jetting active radicals generated through dissociation of reaction gas in plasma, a reaction gas supply passage 16 for introducing the reaction gas toward the jet opening, an inert gas supply passage 15 for introducing inert gas toward the jet opening while preventing it from being mixed, in the container, with the reaction gas flowing through the reaction gas supply passage, a discharge electrode 11 constituted of the opening end part of the inert gas supply passage, an earth electrode 7 disposed oppositely to the discharge electrode while being insulated therefrom, a power supply 17 connected with the discharge electrode and generating discharge plasma between the discharge electrode and the earth electrode, and a throttling mechanism 13 disposed between the reaction gas supply passage and the discharge plasma generating region and joining the reaction gas being introduced into the discharge plasma generating region through the reaction gas supply passage to the inert gas being introduced into the discharge plasma generating region through the inert gas supply passage. COPYRIGHT: (C)2003,JPO
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