| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a constant flow rate valve capable of performing differential pressure control easily and with superior responsiveness without making a fluid to be controlled stand still and without making it contact anything but a diaphragm, and also a method for mixing a constant fluid amount for mixing a plurality of fluids effectively using the valve. <P>SOLUTION: The system comprises a valve body 10, a valve operating chamber 20 formed by the valve body, a connection passageway 50, a valve system 30 installed in the valve operating chamber and a throttling part 60 installed in the connection passageway. In the valve operating chamber an inlet 11 for a primary fluid, a valve seat 15, an outlet 12 to the connecting flow path, an inlet 13 from the connecting flow path and an outlet 14 for a secondary fluid are formed. The valve system 30 comprises a first diaphragm part 41 to move in unison with a valve seat 31, a second diaphragm part 42 and a third diaphragm part 43. <P>COPYRIGHT: (C)2003,JPO</p> |
