| 摘要 |
PROBLEM TO BE SOLVED: To reduce an amount of deposit on the surface of an insulator to extend operation time of an ion source with a simple structure. SOLUTION: The ion source includes a plasma generating vessel 2 whose respective walls around an insulator 10 of filament and an insulator 14 of reflecting electrode have a plurality of holes 34 and 36 through which the gases is exhausted from the vessel. Inner walls of the vessel around a facing electrodes of a reflecting electrode 12 and a rear reflecting electrode 22 have grooves 38 and 40, respectively. These electrodes 12 and 22 are extended to the opening of the respective grooves to form a labyrinth structure with keeping insulation between the electrodes and the inner walls. COPYRIGHT: (C)2003,JPO
|
