LIGHT RECEIVING ELEMENT ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a light receiving element array capable of reducing cross talking between light receiving elements and a light receiver using the light receiving element array. SOLUTION: The light receiving element array is constituted of arraying many light receiving elements each of which consists of a pin photodiode. Each light receiving element is provided with a semi-insulating semiconductor substrate 10, an n-type semiconductor layer 11, an i-type semiconductor layer 12 and a p-type semiconductor layer which are successively laminated on the surface of the substrate 10. A separation groove 17 is formed between adjacent light receiving element by partially removing respective layers 11, 12. Then an n-type electrode 15 is formed on the n-type semiconductor layer 11 exposed by removing the layers and a p-type electrode 16 is formed on the p-type semiconductor layer. COPYRIGHT: (C)2003,JPO