| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting method and a mounting apparatus capable of carrying out at least prescribed alignment and joint under pressure between joining members by a small mechanism in one chamber easily and of providing high-pressure joining easily if necessary. SOLUTION: After relative positions of joining members are aligned in a chamber, a difference of atmospheric pressure between a first space as a space between two joining members and a second space as a space other than the first space in the chamber is utilized to join the joining members under pressure. COPYRIGHT: (C)2003,JPO
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