| 摘要 |
PROBLEM TO BE SOLVED: To solve such inconvenience that there is a limit to improve the characteristics of a magnetic thin film due to the trade-off relation between resistance and a ferromagnetic resonance frequency in a conventional magnetic film, although the magnetic thin film having a high ferromagnetic resonance frequency and high resistance is necessary in order to obtain a high Q-value in a high-frequency region at a GHz level. SOLUTION: A magnetic thin film inductor is provided with a spiral coil, an insulator film covering the spiral coil, and a magnetic film layer that is formed on at least one side of the spiral coil via an insulator film. The magnetic film layer is a mixed film of a ferromagnetic metal and an insulating compound or a stacked film with a ferromagnetic metal layer and an insulating compound layer stacked alternately. Especially, the ferromagnetic metal constituting the stacked film is formed of an alloy of cobalt or iron, and the insulating compound constituting the mixed film or the multilayer film is formed of aluminum or silicon oxide, nitride, carbide and boride. COPYRIGHT: (C)2003,JPO
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