| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin transparent conductive film which has low sintering temperatures and low electric resistances after sintering. SOLUTION: After applying onto a substrate to be treated a dispersion liquid including fineparticles of at least one kind of each component metal in a metal oxide for forming the transparent conductive film or fine particles of at least one kind of alloy composed of each component metal, in an oxygen gas or an ozone gas atmosphere under atmospheric pressure, or in a plasma atmosphere of a gas in which an oxygen gas or an ozone gas is added to a helium gas, the substrate is oxidized and sintered simultaneously by being heated at 150°C to 250°C to form the transparent conductive film composed of the metal oxide. COPYRIGHT: (C)2003,JPO
|
