摘要 |
PROBLEM TO BE SOLVED: To provide a transparent conductive thin film that is sintered at low temperatures, has low electrical resistances after sintering, and has a described film thickness, and to provide its manufacturing method. SOLUTION: A plurality of alternating conductive metal fine particle and conductive metal films are laminated. These laminated films are collectively, or whenever each film is formed, sintered at 180-250°C in the atmosphere to form the transparent conductive film. COPYRIGHT: (C)2003,JPO
|