| 摘要 |
PROBLEM TO BE SOLVED: To integrate centering members on a disk chucking table in a state in which the members are centered as centering on a rotating central axis. SOLUTION: A disk chucking mechanism 1 disposes the centering member 4 on the disk chucking table 3 which rotates as centering on an axis 2, and performs centering of a disk 201 by abutting a plurality of pawls 42 for disk centering provided at a rim of the centering member 4 to a periphery face of a centering hole 202 at a central part of the disk 201 when chucking the disk 201 in the disk chucking table 3. The centering member 4 is formed with a leaf spring member, and has at a central part a bearing hole 43 to which the axis 2 is inserted, and at the rim the plurality of the pawls 42 for disk centering in a radial pattern centering on the bearing hole 43. COPYRIGHT: (C)2003,JPO
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