SURFACE FOREIGN MATTER INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface foreign matter inspection device that realizes short time for foreign matter inspection and high detection sensitivity. SOLUTION: The surface foreign matter inspection device for inspecting foreign matter on an inspected body 4 with an optical means comprises a stage 4a movable with the inspected body 4 mounted thereon; a light radiating means 5 for radiating light onto the surface of the inspection body 4; a light focusing means 12 having a cylindrical mirror 1 for reflecting scattered light 3a by foreign matter on the inspected body 4 into parallel light 3b, and a focusing lens 2 for focusing the parallel light 3b; a light detecting means 6 for detecting the focused light; and an information processor 100 for processing an output signal of the light detecting means 6 and position information about the foreign matter on the inspected body 4. COPYRIGHT: (C)2003,JPO