摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an anti-fuse and its writing method which realize the cost reduction and the fining of a semiconductor device, etc. <P>SOLUTION: The anti-fuse 23 is composed of a substitutable layer 14 and a wiring layer 20, having metal atoms substitutable for constituent atoms of the substitutable layer. For writing in the anti-fuse, at least either the substitutable layer or the wiring layer is heated by a laser radiation means, etc., to substitute the metal atoms in the wiring layer for the constituent atoms in the substitutable layer, thereby changing the substitutable layer from a non- conducting state to a conducting state. <P>COPYRIGHT: (C)2003,JPO</p> |