| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning solution which causes no surface deterioration even for easily oxidizable metal, to provide an inexpensive cleaning method by which environmental loads are reduced, and high productivity can be realized, and to provide a cleaning apparatus for effectively performing the same method. SOLUTION: The cleaning solution for easily oxidizable metal consists of a sulfate aqueous solution in which pH is 9.5 to 11, and an oxidation-reduction potential is -100 mV to -890 mV vs.SCE. In the method of cleaning easily oxidizable metal, the surface of easily oxidizable metal is degreased and cleaned using the same cleaning solution. COPYRIGHT: (C)2003,JPO
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