发明名称 SCALE FOR ABSOLUTE ENCODER, ITS MANUFACTURING METHOD, AND ABSOLUTE ENCODER
摘要 PROBLEM TO BE SOLVED: To realize a small-sized absolute encoder by using a scale which generates an absolute signal by a single track. SOLUTION: A change in the amplitude of a signal caused by changing the scale depth (h) on the scale 20 is used as a long-period track signal, and is used together with a plane signal obtained from a short-period scale. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003247864(A) 申请公布日期 2003.09.05
申请号 JP20020050104 申请日期 2002.02.26
申请人 MITSUTOYO CORP 发明人 TOMINAGA ATSUSHI;KAWATOKO OSAMU
分类号 G01D5/30;G01D5/34;G01D5/347;G01D5/38;G03F7/20;(IPC1-7):G01D5/30 主分类号 G01D5/30
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