| 摘要 |
PROBLEM TO BE SOLVED: To provide an angle detecting device that can detect angles with high resolution over a wide dynamic range. SOLUTION: This angle detecting device is provided with a target 5, a converting mechanism which converts the rotational displacementθof a turntable 1 into the linear displacementθ' of the target 5 in the Z-direction, and detecting means (7, 8, and 9) which detect the linear displacement of the target 5. The target 5 is attached to a fixed end through two leaf spring elements 6. The converting mechanism has first and second rolling bearings 10 and 11 respectively having rotary shafts (10a and 11a) intersecting each other at right angles. The bearings 10 and 11 are disposed in a state where the bearings 10 and 11 are brought into point-contact with each other. This angle detecting device is also provided with an elastic element 12 for flexibly holding the contacted state between the two rolling bearings 10 and 11. COPYRIGHT: (C)2003,JPO
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