| 摘要 |
PROBLEM TO BE SOLVED: To secure precise positions for transfer signals regardless of thermal expansion of a master substrate without severely controlling ambient temperature when making magnetic transfer by closely adhering the master substrate and a slave medium and applying magnetic fields. SOLUTION: The master substrate 3 has a magnetic layer 32 on a pattern of a master base plate 31, and thermal expansion coefficient of the base plate 31 is 5 to 25×10<SP>-6</SP>/°C and 8×10<SP>-6</SP>/°C in other directions. Conveniently, the base plate 31 consisting of Ni-Co containing pure Ni or a little amount of Co is easily obtained with a thermal expansion coefficient of about 13×10<SP>-6</SP>and another one consisting of Fe-Co-Ni and containing Ni 60% or more is also easily obtained with a thermal expansion coefficient of about 12×10<SP>-6</SP>. It is desirable that the ratio is between 0.3 to 2.1 for the thermal expansion coefficients A and B respectively of the base plate of the master substrate 3 and the base plate of the slave medium 2. COPYRIGHT: (C)2003,JPO
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