| 摘要 |
PROBLEM TO BE SOLVED: To realize highly precise recording by easily and correctly focusing electron beam corresponding to an original recording 1 in an electron beam irradiating equipment which records data with irradiation of the electron beam to the original recording 1. SOLUTION: A focusing stage 30, which is positioned alongside the original recording 1 and is equipped with a knife edge 134 and a Faraday cup 131, is arranged on a slide table 6 of a supporting mechanism 2 which supports the original recording 1. When recording, the electron beam first irradiates the focusing stage 30 for focusing, then the original recording 1 for recording. COPYRIGHT: (C)2003,JPO
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