| 摘要 |
PROBLEM TO BE SOLVED: To maintain required vacuum degree without lowering the vacuum degree even if relative speed of a static pressure surfacing pad 19 and an object is raised in a device wherein the static pressure surfacing pad 19 sticks to the object with slight interspace by non-contact to obtain partial vacuum. SOLUTION: Exhaust grooves 40 and 41 with a shape having an exhaust effect by relative displacement with the object are formed on a facing surface against the object in the static pressure surfacing pad 19, and this exhaust effect by these exhaust grooves is designed to refrain the decrease of the vacuum degree. COPYRIGHT: (C)2003,JPO
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