摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of improving measurement precision of a pressure value. SOLUTION: This pressure sensor is provided with a guide 4 covering an outer peripheral wall face of a pressure receiving pin 3 and a thin film diaphragm 5 blocking a clearance between the pressure receiving pin 3 and the guide 4 and transmitting received pressure to the pressure receiving pin 3 on a pressure receive side of the guide 4 and the pressure receiving pin 3. COPYRIGHT: (C)2003,JPO
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