| 摘要 |
PROBLEM TO BE SOLVED: To provide a piping which can be connected to a movable body arranged in vacuum atmosphere and holds the vacuum atmosphere with high to medium vacuum degree with high accuracy by preventing bad influences such as lowered vacuum degree in a vacuum chamber due to degasification or permeable gas. SOLUTION: This piping is characterized by that it has a tube 20 used for delivery of a fluid to a positioning device 3 arranged in the vacuum atmosphere and the tube 20 has a resin layer 21 metal layer 22 covering the resin layer 21. COPYRIGHT: (C)2003,JPO
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