| 摘要 |
PROBLEM TO BE SOLVED: To provide a concentration measuring method for acid mixed aqueous solution in an etching process allowing simpler measurement of weight % concentration of each component of acid mixed aqueous solution than a conventional measuring method. SOLUTION: In this concentration measuring method for acid mixed aqueous solution in the etching process, components in a sample excepting one component are analyzed, volume of each component is obtained from weight of each analyzed component and known density to calculate volume of unanalyzed component from it. After obtaining its weight from the volume of unanalyzed component and known density of the unanalyzed component, density of the sample is inferred from total weight of them and volume of the sample to specify weight % concentration of each component using the inferred density of the sample. COPYRIGHT: (C)2003,JPO
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