Detection device and method

摘要

A detection device and a detection method are disclosed in the embodiments. The detection device comprises a light source, a first image information acquisition unit, a first charge coupled device (CCD), a first light splitter, and a first analyzer. The first image information acquisition unit is configured to receive a first light signal from the light source and transmit the first light signal onto a substrate, and to acquire a first image light signal generated by transmitting the first light signal onto both an edge of a first ID figure on the substrate and an edge of the substrate, and transmit the first image light signal to the first light splitter; the first light splitter is configured to transmit the first image light signal to the first CCD so that the first CCD outputs a first electrical signal; and the first analyzer is configured to receive the first electrical signal outputted from the first CCD and analyze wave crests of the first electrical signal, thereby obtaining a distance between the edge of the first ID figure on the substrate and the edge of the substrate. The detection part and detection method are used for substrate detection.

主权项

1. A detection device, comprising:
a light source, a first image information acquisition unit, a first charge coupled device (CCD), a first light splitter, and a first analyzer, wherein: the first image information acquisition unit is configured to receive a first light signal from the light source and transmit the first light signal onto a substrate, and to acquire a first image light signal generated by transmitting the first light signal onto both an edge of a first ID figure on the substrate and an edge of the substrate, and transmit the first image light signal to the first light splitter; the first light splitter is configured to transmit the first image light signal to the first CCD so that the first CCD outputs a first electrical signal; the first analyzer is configured to receive the first electrical signal outputted from the first CCD and analyze wave crests of the first electrical signal, thereby obtaining a distance between the edge of the first ID figure on the substrate and the edge of the substrate; and the detection device further comprising:
a first reflecting mirror, wherein:
the first light splitter is configured to receive the first light signal from the light source through the first reflecting mirror while the first reflecting mirror filters out interference light signals from the first light signal; andthe first light splitter is further configured to transmit the received first light signal to the first image information acquisition unit, the detection device further comprising:
a second light splitter, a third light splitter, a second Image Information acquisition unit, a second CCD, and a second analyzer, wherein:the second light splitter is configured to split the light signal emitted from the light source into the first light signal and a second light signal, and transmit the second light signal to the third light splitter;the third light splitter is configured to transmit the second light signal to the second image information acquisition unit;the second image information acquisition unit is configured to transmit the received second light signal onto the substrate, and to acquire a second image light signal generated by transmitting the second light signal onto both an edge of a second ID figure on the substrate and an edge of the substrate, and transmit the second image light signal to the third light splitter;the third light splitter is further configured to transmit the second image light signal to the second CCD so that the second CCD outputs a second electrical signal; and the second analyzer is configured to receive the second electrical signal outputted front the second CCD and analyze wave crests of the second electrical signal, thereby obtaining a distance between the edge of the second ID figure on the substrate and the edge of the substrate.