Method for making monolithic piezoelectric ceramic element

摘要

A method for making a monolithic piezoelectric ceramic element having high mechanical strength, excellent piezoelectricity, and high reliability is disclosed. The method includes the steps of applying a conductive paste including a conductor containing Ag as a principal ingredient to ceramic green sheets comprising a piezoelectric ceramic material containing a Pb compound, stacking the ceramic green sheets to form a laminate, and firing the laminate in an atmosphere with an oxygen concentration of about 90% by volume or more during the heating period and with an oxygen concentration of about 5% to 15% by volume during the isothermal period and during the cooling period.