PLATE-LIKE OBJECT CARRYING MECHANISM AND DICING DEVICE WITH CARRYING MECHANISM

摘要

A conveying apparatus for conveying a plate-like object that is affixed to the top surface of a protective tape mounted to cover the inside opening of a support frame formed in an annular form, comprising a suction-holding member having a negative pressure chamber which is open at the bottom and an annular contact portion to be contacted to the top surface of the support frame on the under surface, the negative pressure chamber being connected to a suction-source; and a moving unit for moving the suction-holding member between a first predetermined position and a second predetermined position.