发明名称 LOW-COHERENCE INFEROMETRIC DEVICE FOR LIGHT-OPTICAL SCANNINGOF AN OBJECT
摘要 A low-coherence inferometric device for light-optical scanning of an object (18) comprising a short-coherence interferometer (6) consisting of a short- coherence light source (7), a reference reflector (21) and a detector (25). The light (7) emitted by the light source (7) is divided into two light path s (11,12). A first part thereof is radiated onto the object as a measuring lig ht (16) and a second part thereof is radiated onto the reference reflector (21) as a reference light (22). The measuring light (16) and the reference light (22). After reflection on the object (18) or reference reflector (21), the measuring light (16) and the reference light (22) are combined at a beam junction (10). In order to ensure rapid scanning, a variable wavelength selection device (30) is arranged in the light path of the detection light between the beam junction (10) and the detector (25), enabling the detection light (24) to be selected according to the wavelength thereof, whereby selectively preferred light reaches the detector (25) at wavelengths corresponding to an adjustable sequence of wave numbers k for said scanning.
申请公布号 CA2476174(A1) 申请公布日期 2003.09.04
申请号 CA20032476174 申请日期 2003.02.01
申请人 KNUTTEL, ALEXANDER 发明人 KNUTTEL, ALEXANDER
分类号 G01B9/02;G01B11/24;G01N21/47;(IPC1-7):G01B9/02 主分类号 G01B9/02
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