发明名称 |
Cleanroom lift having an articulated arm |
摘要 |
A cleanroom lift for maneuvering large objects such as turbomolecular pumps utilized in semiconductor processing applications is provided. In one embodiment, the lift includes a vertically movable carriage coupled to a linkage assembly. The linkage assembly has a first link and a second link. Each link has one piece construction to minimize deflection under load. The first link is coupled to the carriage by a carriage shaft assembly and to the second link by a linkage shaft assembly. The second link is coupled to the linkage shaft assembly and a gripper assembly. Optionally, a third link and second shaft assembly may be disposed between the gripper assembly and the second link to minimize the weight of the links to facilitate assembly in cleanroom environments.
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申请公布号 |
US2003165378(A1) |
申请公布日期 |
2003.09.04 |
申请号 |
US20020091686 |
申请日期 |
2002.03.04 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LAVITSKY ILYA;ROSENSTEIN MICHAEL |
分类号 |
B25J5/00;B25J9/04;B25J18/04;(IPC1-7):B25J18/00 |
主分类号 |
B25J5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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