发明名称 |
Rotation-type decoupled MEMS gyroscope |
摘要 |
A rotation-type decoupled MEMS gyroscope including a drive body movable about the X-axis, a sensing body movable about the Z-axis, a medium body moving together with the drive body about the X-axis and the sensing body about the Z-axis. The drive body is fixed on a substrate by a first torsion spring torsion-deformed about the X-axis, and the medium body is connected to the drive body by a first bending spring bending-deformed about the Z-axis. The sensing body is connected to the medium body by a second torsion spring torsion-deformed about the X-axis and fixed to the substrate by a second bending spring bending-deformed about the Z-axis. If angular velocity is applied relative to the Y-axis while the drive body vibrates in a certain range about the X-axis by a driving electrode, the sensing body rotates about the Z-axis by the Coriolis force and a sensing electrode senses the rotation.
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申请公布号 |
US2003164041(A1) |
申请公布日期 |
2003.09.04 |
申请号 |
US20030359272 |
申请日期 |
2003.02.06 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JEONG HEE-MOON;KIM JUN-O;LEE BYEUNG-LEUL;LEE SANG-WOO |
分类号 |
B81B5/00;G01C19/56;G01P9/04;(IPC1-7):G01P9/00 |
主分类号 |
B81B5/00 |
代理机构 |
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