Electronic apparatus for manufacturing liquid crystal display device comprises unitary vacuum processing chamber, upper and lower stages confronting each other at upper and lower spaces, and first substrate lifting system

摘要

#CMT# #/CMT# An electronic apparatus comprises unitary vacuum processing chamber (110), upper and lower stages (121, 122) confronting each other at upper and lower spaces inside the vacuum processing chamber to bond first and second substrates (510, 520), and first substrate lifting system (400) formed in the lower stage for lifting the second substrate. #CMT# : #/CMT# An independent claim is also included for a method for manufacturing liquid crystal display device comprising placing substrate on first substrate lifting system through moving the first substrate lifting system along upward direction, and placing substrate on upper surface of lower stage through moving the first substrate lifting system along downward direction. #CMT#USE : #/CMT# For manufacturing liquid crystal display device (claimed). #CMT#ADVANTAGE : #/CMT# The invention avoids interference between the driving parts, and provides easy installation of each of the driving parts. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The figure is a cross sectional view of an electronics apparatus having substrate lifting system. 110 : Unitary vacuum processing chamber 121, 122 : Upper and lower stages 300 : Loader part 400 : First substrate lifting system 410a : First support part 420 : First elevating axis 430 : First driving part 510, 520 : First and second substrates #CMT#ELECTRONICS : #/CMT# Preferred Component: The first substrate lifting system includes first support part (410a) to support the substrate, and first receiving part to receive the first support part formed in the lower stage. The electronic apparatus further includes first elevating axis (420) provided in the first support part and penetrating the first receiving part from bottom portion of the lower stage to move the first support part along the up and down direction, first driving part (430) connected to the first elevating axis to operate the first elevating axis to move along the up and down direction, second elevating axis to move the second support part along the upward and downward directions, second driving part connected to the second elevating axis to operate the second elevating axis along the upward and downward direction, and loader part (300) driven to load and unload the substrates into and out of the vacuum processing chamber. The first support part is shaped like a bar, round pin, or polygonal hollow pipe. The second substrate lifting system includes second support part(s) received inside a second receiving part and positioned initially at lower stage to support side bottoms of substrate. The faces of the first and second support parts to be contacted with the substrate are coated with coating material to prevent damage of the substrate caused by contact with the substrate. The second support parts contact the first substrate in face contact, line contact, or point contact. The contact portion between first substrate lifting system and substrate is in a dummy area between cell areas of the substrate when the substrate is placed on the first substrate lifting system. Preferred Process: The manufacture of liquid crystal display device further includes moving second substrate lifting system along the upward direction to support the substrate together with the first substrate lifting system. #CMT#POLYMERS : #/CMT# Preferred Material: The coating material includes Teflon(RTM: polytetrafluoroethylene), PEEK (RTM: polyetheretherketone), or electro-conductive materials.