发明名称 Method of reinforcing a mechanical microstructure
摘要 A mechanical microstructure including a deformable first layer overhanging a second layer and defining a cavity set back from an external face of the deformable first layer and having an abutment stud projecting into the cavity, in which a wire is connected to a portion of an internal face of the deformable first layer. The portion of the first layer is opposite a bottom area of the cavity into which the abutment stud projects, but the abutment stud remains at a distance from the deformable first layer. A method of producing the mechanical microstructure is also disclosed.
申请公布号 US2003166310(A1) 申请公布日期 2003.09.04
申请号 US20020330644 申请日期 2002.12.27
申请人 CAPLET STEPHANE 发明人 CAPLET STEPHANE
分类号 G01P15/125;B81B3/00;B81B7/00;B81C1/00;G01P15/08;H01L29/84;(IPC1-7):H01L21/00;H01L29/82 主分类号 G01P15/125
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