发明名称 TREATMENT SUBJECT RECEIVING VESSEL BODY, AND TREATING SYSTEM
摘要 <p>A treatment subject receiving vessel body (72) comprises a portable vessel main body (92), a treatment subject support member (100) installed in the vessel main body and capable of supporting a plurality of treatment subjects (W), a joining port (96) formed in one side surface of the vessel main body and communicating with the interior of the vessel main body, an openable/closable gate valve (94) installed in the joining port, and an exhaust port (108) made openable/closable to be capable of exhausting the vessel main body. When the gate valve and exhaust port are closed, the vessel main body is brought to the sealed state.</p>
申请公布号 WO2003073497(P1) 申请公布日期 2003.09.04
申请号 JP2003002380 申请日期 2003.02.28
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