ANIONIC ABRASIVE PARTICLES TREATED WITH POSITIVELY-CHARGED POLYELECTROLYTES FOR CMP,申请号AU20030216217-传众专利搜索

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发明名称	ANIONIC ABRASIVE PARTICLES TREATED WITH POSITIVELY-CHARGED POLYELECTROLYTES FOR CMP
摘要
申请公布号	AU2003216217(A1)	申请公布日期	2003.09.04
申请号	AU20030216217	申请日期	2003.02.10
申请人	CABOT MICROELECTRONICS CORPORATION	发明人	ISAAC, K. CHERIAN;PHILLIP, W. CARTER;JEFFREY, P. CHAMBERLAIN;KEVIN, J. MOEGGENBORG;DAVID, W. BOLDRIDGE
分类号	B24B37/04;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C09G1/16	主分类号	B24B37/04
代理机构		代理人
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