| 摘要 |
<p>Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces and methods of fabrication are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least partially formed from the substrate, and an electromagnetic actuator disposed on the substrate for selectively applying a first force to the actuable element to displace the actuable element along a path. The actuable element may have a base and an arm coupled to the base. The base may include a portion comprised of a magnetic material. The electromagnetic actuator may comprise an electrically conductive coil, and the path of the actuable element may pass through a coil gap in the coil. The electromagnetic actuator may also comprise a magnetic core about which the electrically conductive coil may be wound. MEMS devices and methods of fabrication that can minimize derailing of actuable elements during fabrication and the effects of fabrication tolerances on the operation of the devices are also disclosed herein.</p> |
