Diffraction grating device manufacturing method, diffraction grating device manufacturing apparatus, and diffraction grating device

摘要

In this diffraction grating device manufacturing method, refractive-index-change-inducing light of a wavelength that induces a change in refractive index is irradiated onto an optical waveguide, thus forming a diffraction grating through refractive index modulation along the longitudinal direction of the optical waveguide. At this time, the position of irradiation of the refractive-index-change-inducing light onto the optical waveguide is swung in a direction perpendicular to the longitudinal direction of the optical waveguide.