| 发明名称 |
Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers |
| 摘要 |
Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.
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| 申请公布号 |
US2003164949(A1) |
申请公布日期 |
2003.09.04 |
| 申请号 |
US20020086922 |
申请日期 |
2002.03.01 |
| 申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
TAYLOR JOHN S.;FOLTA JAMES A.;MONTCALM CLAUDE |
| 分类号 |
G03F1/14;G03F7/20;(IPC1-7):G01B11/02 |
主分类号 |
G03F1/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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