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发明名称
Ion Implantation Beam Monitor
摘要
申请公布号
GB2382716(B)
申请公布日期
2003.09.03
申请号
GB20030004137
申请日期
1998.07.21
申请人
* APPLIED MATERIALS, INC.
发明人
ROBERT JOHN CLIFFORD * MITCHELL;SIMON HERBERT * POVALL;LESLIE * LANE;AMIR * AL-BAYATI
分类号
H01J37/304;H01J37/317;(IPC1-7):H01J37/304
主分类号
H01J37/304
代理机构
代理人
主权项
地址
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