FLAT CABLE FOR SEMICONDUCTOR EXPOSURE EQUIPMENT AND CONNECTING APPARATUS THEREOF

摘要

PURPOSE: A flat cable for semiconductor exposure equipment is provided to prevent the flat cable from being easily damaged by improving the quality of the flat cable, and to extend the kinds of the flat cable by easily connecting a new flat cable having a changed connection structure without changing a conventional printed circuit board while using a socket unit. CONSTITUTION: A wafer holder for holding a wafer is installed in a stage. An interface unit has a circuit board to which the flat cable(33) is connected such that the flat cable delivers a driving signal for transferring the stage to a predetermined direction from a control unit. An insulation material plate(33a) is made of a polyurethane material. Soft conductors(33b) are disposed between the insulation material plates at regular intervals.