Seed crystal for production of slicon single crystal and method for production of silicon single crystal

摘要

In the manufacture of a silicon single crystal by the Czochralski method, this invention aims to provide a seed crystal for use in the production of the silicon single crystal, which seed crystal is capable of preventing creation of dislocation occurring during the immersion of the seed crystal in molten silicon and withstanding the load of a silicon single crystal of great weight as well. The invention also aims to provide a method for the production of the seed crystal and a method for the production of a silicon single crystal which enables the ratio of elimination of dislocation to be exalted. A seed crystal for the production of a silicon single crystal for use in the manufacture of a silicon single crystal by the Czochralski method, characterized in that the boron concentration in the silicon single crystal as the matrix from which the silicon seed crystal is excised is not less than 4 x 10<18> atoms/cm<3> and not more than 4 x 10<19> atoms/cm<3> and the silicon seed crystal is excised from the silicon single crystal as the matrix, ground, and lapped, and subsequently subjected to surface etching, a method for the production thereof, and a method for the production of a silicon single crystal by the use of the seed crystal.