| 发明名称 |
CERAMIC HEATER FOR SEMICONDUCTOR MANUFACTURING AND INSPECTING DEVICES |
| 摘要 |
An object of the present invention is to provide a ceramic heater for a semiconductor-producing/examining device which has a short temperature dropping time and can be rapidly cooled. The present invention is a ceramic heater for a semiconductor-producing/examining device comprising a resistance heating element on a surface thereof, wherein the resistance heating element has a surface roughness Ra according to JIS B 0601 of 0.01 mu m or more. <IMAGE>
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| 申请公布号 |
EP1341215(A1) |
申请公布日期 |
2003.09.03 |
| 申请号 |
EP20010998990 |
申请日期 |
2001.11.29 |
| 申请人 |
IBIDEN CO., LTD. |
发明人 |
KARIYA, SATORU;ITO, YASUTAKA |
| 分类号 |
H05B3/20;H01L21/00;H01L21/203;H01L21/66;H01L21/683;H05B3/12;H05B3/14;H05B3/16;(IPC1-7):H01L21/02;H05B3/68;H01B3/16;H05B3/10 |
主分类号 |
H05B3/20 |
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