发明名称 Liquid substrate ion collector
摘要 An apparatus for removing selected metal ions from a plasma includes a plasma chamber and at least one silica substrate (32,34) mounted inside the chamber. More specifically, the substrate is exposed in the chamber so that when metal ions (14,16) from the plasma (12) contact the substrate they diffuse into the substrate to create a liquified layer (36,38). A receptacle (42,44) is also provided to receive the liquid from the layer as it flows from the substrate.
申请公布号 EP1341206(A2) 申请公布日期 2003.09.03
申请号 EP20030075437 申请日期 2003.02.14
申请人 发明人
分类号 H01J37/05;H01J49/04;H01J37/32;H01J49/02;H01J49/28;H01J49/30;(IPC1-7):H01J49/04 主分类号 H01J37/05
代理机构 代理人
主权项
地址