发明名称 AUTOMATIC SLIT CONTROL APPARATUS
摘要 PURPOSE: An automatic slit control apparatus is provided to simply operate and to increase life time by controlling automatically a slit. CONSTITUTION: An automatic slit control apparatus includes an aperture flexure(31), a plurality of driving units(22), and a control unit for controlling the driving unit. The driving units(22) further include a roller(32) for pressing the aperture flexure, a motor(29) coupled to the roller, an over-travel prevention part located on the upper portion of the driving unit, and a safety driving part located on the lower portion of the driving unit. The over-travel prevention part further includes a flag(26) and an optical sensor(25).
申请公布号 KR100398582(B1) 申请公布日期 2003.09.03
申请号 KR19940008836 申请日期 1994.04.26
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JUNG, UK CHAE
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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