The invention relates to a method of producing silane or hydrochlorosilanes by disproportionation of a higher chlorinated hydrochlorosilane or a mixture of said hydrochlorosilanes in the presence of a catalyst. Before the catalyst is used, it is a) washed with hyper-pure water in one or several steps; b) transferred in the water-moist state to the reactor in which the disproportionation is to proceed; c) treated in the reactor with boiling methanol or rinsed with anhydrous methanol; and d) the methanol is removed from the catalyst by evacuation and/or stripping with inert gas. The invention further relates to a method for treating disproportionation catalysts.
