| 摘要 |
PURPOSE: A method for removing particles when a liquid crystal display substrate is loaded is provided to blow nitrogen or air with high pressure on the substrate while the substrate is being loaded on a robot arm to float particles and remove the floated particles by a vacuuming device. CONSTITUTION: A substrate(500) on which a pattern is formed is prepared. The substrate is loaded by a robot arm(504). Nitrogen gas or air with high pressure is blown to the surface of the loaded substrate to float particles on the substrate. A vacuuming device(506) is connected to both sides of the substrate to remove the particles floated by the gas using the vacuuming device. When the particles are eliminated from the substrate, the pattern formed on the substrate is not removed.
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