发明名称 |
Process and apparatus for light induced chemical treatment of a workpiece |
摘要 |
The chemical treatment device has a chamber with at least one inlet and at least one outlet for a material (19) for chemical treatment of a workpiece arranged in the chamber. At least one section of the chamber wall is formed by a light transmitting optical imaging plate (12) for forming an image of an illumination pattern on the surface of the workpiece in the chamber. AN Independent claim is also included for the following: (a) a method of light induced chemical treatment of a workpiece.
|
申请公布号 |
EP1341211(A2) |
申请公布日期 |
2003.09.03 |
申请号 |
EP20030003492 |
申请日期 |
2003.02.14 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
KROENER, FRIEDRICH, DR.;WISTRELA, ROBERT |
分类号 |
C25F3/12;G03F7/20;H01L21/00;H01L21/306;H01L21/308;(IPC1-7):H01L21/00;H01L21/302 |
主分类号 |
C25F3/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|