SURFACE TREATMENT DEVICE,申请号KR20030011080-传众专利搜索

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发明名称	SURFACE TREATMENT DEVICE
摘要
申请公布号	KR20030071498(A)	申请公布日期	2003.09.03
申请号	KR20030011080	申请日期	2003.02.21
申请人		发明人
分类号	F25D9/00;H01L21/3065;C23C16/46;C23F4/00;H01L21/00	主分类号	F25D9/00
代理机构		代理人
主权项
地址

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