发明名称 MOUNT TOOL AND MOUNT STAGE OF SEMICONDUCTOR DIE BONDING EQUIPMENT
摘要 PURPOSE: A mount tool of semiconductor die bonding equipment is provided to improve work efficiency of a die bonding process regardless of the type of a device. CONSTITUTION: A junction surface(52) has a surface for pressing a predetermined object by using external force. A body(56) supports the junction surface. A fixing unit protrudes from the periphery of the body. A fixing unit has a hole to be fixed to a driving unit for supplying external force, capable of rotating.
申请公布号 KR20030071274(A) 申请公布日期 2003.09.03
申请号 KR20020010909 申请日期 2002.02.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 BAE, BU YEONG
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
代理机构 代理人
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