发明名称 |
MEMS valve |
摘要 |
A valve where the valve membrane is made from silicone rubber. Preferably the valve is a microelectromechanical systems (MEMS) thermopneumatic valve. Because of the advantageous physical properties of silicone rubber, the valve provides desirable performance with reasonable power consumption.
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申请公布号 |
US6612535(B1) |
申请公布日期 |
2003.09.02 |
申请号 |
US19980012309 |
申请日期 |
1998.01.23 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
TAI YU-CHONG;YANG XING;GROSJEAN CHARLES |
分类号 |
B81B3/00;F15C5/00;F16K99/00;(IPC1-7):F16K31/02 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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