发明名称 Semiconductor device having dummy pattern
摘要 A semiconductor device includes a real pattern and dummy patterns in respective different coordinate systems. Using a dummy pattern in a single coordinate system does not allow an effective dummy pattern arrangement. To the contrary, if the dummy patterns in different coordinate systems are used, minimum interval requirements may be satisfied in one coordinate system while such requirements are not met in another coordinate system.
申请公布号 US6615399(B2) 申请公布日期 2003.09.02
申请号 US20010962584 申请日期 2001.09.26
申请人 FUJITSU LIMITED 发明人 YAMAUCHI HIDEAKI;OHBA HISAYOSHI;WATANABE JUN;HASHIMOTO KENJI
分类号 G03F1/08;G03F1/70;G06F17/50;H01L21/027;H01L21/3205;H01L21/768;H01L21/82;H01L21/822;H01L23/52;H01L23/522;H01L23/528;H01L27/04;(IPC1-7):G06F17/50 主分类号 G03F1/08
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