发明名称 |
Semiconductor device having dummy pattern |
摘要 |
A semiconductor device includes a real pattern and dummy patterns in respective different coordinate systems. Using a dummy pattern in a single coordinate system does not allow an effective dummy pattern arrangement. To the contrary, if the dummy patterns in different coordinate systems are used, minimum interval requirements may be satisfied in one coordinate system while such requirements are not met in another coordinate system. |
申请公布号 |
US6615399(B2) |
申请公布日期 |
2003.09.02 |
申请号 |
US20010962584 |
申请日期 |
2001.09.26 |
申请人 |
FUJITSU LIMITED |
发明人 |
YAMAUCHI HIDEAKI;OHBA HISAYOSHI;WATANABE JUN;HASHIMOTO KENJI |
分类号 |
G03F1/08;G03F1/70;G06F17/50;H01L21/027;H01L21/3205;H01L21/768;H01L21/82;H01L21/822;H01L23/52;H01L23/522;H01L23/528;H01L27/04;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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