| 摘要 |
PROBLEM TO BE SOLVED: To provide a rod having a film excellent in abrasion resistance formed on its surface, used for a coating apparatus. SOLUTION: The rod 10 has an abrasion-resistant film 14 formed on its surface and is used for the coating apparatus. When the coefficient of thermal expansion of a matrix 12 is set toα<SB>1</SB>×10<SP>-6</SP>/°C, the coefficient of thermal expansion of the film 14 is set toα<SB>2</SB>×10<SP>-6</SP>/°C and the film thickness of the film 64 is set to tμm, the relational expression:|α<SB>1</SB>-α<SB>2</SB>|<3/(t-4)+7 is satisfied. By restricting the heat stress generated in the film 14 to a definite value or less in consideration of both of the film thickness and the coefficient of thermal expansion of the film 14, the heat stress generated in the film 14 at the time of formation of the film 14 or the residual stress generated in the film 14 after the formation of the film 14 can be suppressed to the definite value or less. Accordingly, a crack or peeling is hard to generate in the film 14 even if the temperature of the rod 10 changes during the formation of the film 14 or shearing stress or vertical stress is applied to the surface of the rod 10 during use. COPYRIGHT: (C)2003,JPO
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