摘要 |
A method is provided for manufacturing a liquid crystal display having a gate bus line, a data bus line, and a switching element with a drain electrode on a substrate. The method includes the steps of forming a protection layer over the substrate to cover the gate bus line, the data bus line, and the switching element, depositing a first layer on the protection layer, the first layer having a thermal expansion coefficient smaller than that of the protection layer, and depositing a second layer on the first layer, the second layer having a thermal expansion coefficient substantially consistent with that of the first layer. The method further includes the steps of removing portions of the second layer on the first layer to form a desired pattern of the second layer, removing portions of the first layer using the patterned second layer as a mask to form a desired pattern of the first layer, and removing the second layer remaining on the patterned first layer.
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