| 摘要 |
PURPOSE: An apparatus and a method for removing particles on a photo mask are provided to remove organic impurities formed on a surface of the photo mask and a pellicle without using a physical power. CONSTITUTION: An electrostatic induction portion is formed with an electrostatic plate(21), a case(22), an electrostatic induction material(23), and a driving portion. The electrostatic plate(21) faces an impurity formation side(101) of a photo mask(100). The electrostatic plate(21) is used for pulling impurities from the photo mask(100). The case(22) is formed at a rear end portion of the electrostatic plate(21). The electrostatic induction material(23) is installed in the inside of the case(22) in order to induce static electricity. A plurality of pipes(24) are installed in the inside of the case(22). A plurality of holes(25) are formed along the pipes(24). A fan(26) and a driving motor(27) are sued for supplying air to the pipes(24).
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